Tergeo plasma cleaner 75W

Tergeo plasma cleaner 75W including In-situ plasma source for immersion mode cleaning. Plasma sensor for quantitative plasma intensity measurement. 75W 13.56MHz high frequency RF supply with auto-matching.

Consisting of:

• Thick-wall quartz tube (5mm thick) with inner diameter 110mm and outer diameter 120mm, depth 280mm
• In-situ plasma source for immersion mode cleaning.
• Plasma sensor for quantitative plasma intensity measurement
• 75W 13.56MHz high frequency RF supply with auto-matching. Adjustable from 1 to 75W at 1W intervals
• 7-inch resistive LCD industrial touchscreen controller
• Fully automatic operation with 20 recipe support
• Job sequence mode operation to execute three cleaning steps
• Two mass flow controller (MFC) regulated gas inputs (supports up to three)
• Mass flow controller (MFC) option upon request)
• Pressure sensor
• Venting/purging port with electronic solenoid valve (Swagelock 1/4″ compression fitting)
• One pumping port with electronic shut-off valve and standard NW/KF25 vacuum port
• Optional plasma pulsing – see: PIE-TG104

Vacuum pump required – see options