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Tergeo-Plus plasma cleaner, 150W
SKU: PIE-TP100
Tergeo-plus plasma cleaner 150W 13.56MHz. In-situ plasma source for immersion mode cleaning. Plasma sensor for quantitative plasma intensity measurement. 150W 13.56MHz high frequency RF supply with auto-matching.
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Pulsed mode operation
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Integrated remote plasma source
Integrated remote plasma source for downstream cleaning mode for 2D materials and other delicate samples
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